Extremely low contact resistances for AlGaAs/GaAs modulation‐doped field‐effect transistor structures
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.334330
Reference6 articles.
1. Ohmic contacts to GaAs
2. Ohmic contacts to III–V compound semiconductors: A review of fabrication techniques
3. Molecular beam epitaxy growth of (Al, Ga)As/GaAs heterostructures
4. Models for contacts to planar devices
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