Implanted boron depth profiles in the AZ111 photoresist
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.341112
Reference7 articles.
1. The range of light ions in polymeric resists
2. Range of boron ions in polymers: A SIMS study
3. Distributions of light ions and foil destruction after irradiation of organic polymers
4. The use of neutron induced reactions for light element profiling and lattice localization
5. A Monte Carlo computer program for the transport of energetic ions in amorphous targets
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