Optical emission characterization of CH4+H2discharges for diamond deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.354488
Reference15 articles.
1. Diamond and diamondlike films: Deposition processes and properties
2. The growth of diamond in microwave plasma under low pressure
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4. Graphite formation in diamond film deposition
5. The effect of excitation frequency on emission spectra of polymerization plasmas
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