The effect of excitation frequency on emission spectra of polymerization plasmas
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.575457
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4. Optical emission characterization of CH4+H2discharges for diamond deposition;Journal of Applied Physics;1993-09-15
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