Stability of ultrathin amorphous carbon films deposited on smooth silicon substrates by radio frequency sputtering
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1330248
Reference34 articles.
1. Microstructure and nanomechanical properties of nitrogenated amorphous carbon thin films synthesized by reactive radio frequency sputtering
2. Dependence of growth and nanomechanical properties of ultrathin amorphous carbon films on radio frequency sputtering conditions
3. Synthesis, composition, surface roughness and mechanical properties of thin nitrogenated carbon films
4. Ultra-Thin Overcoats for the Head/Disk Interface Tribology
5. Hydrogen-free amorphous carbon films: correlation between growth conditions and properties
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