Raman microstructural analysis of silicon-on-insulator formed by high dose oxygen ion implantation: As-implanted structures
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.365735
Reference16 articles.
1. Historical overview of SIMOX
2. Silicon on insulator material technology
3. Defects in SIMOX structures: some process dependence
4. Dislocation formation related with high oxygen dose implantation on silicon
5. Raman scattering and photoluminescence analysis of silicon on insulator structures obtained by single and multiple oxygen implants
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