Amorphous silicon nitride deposited by hot-wire chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1775046
Reference27 articles.
1. High-efficiency screen-printed silicon ribbon solar cells by effective defect passivation and rapid thermal processing
2. Surface recombination velocity of phosphorus-diffused silicon solar cell emitters passivated with plasma enhanced chemical vapor deposited silicon nitride and thermal silicon oxide
3. High performance amorphous-silicon thin film transistors prepared by catalytic chemical vapor deposition with high deposition rate
4. Hot-wire silicon nitride for thin-film transistors
5. NH3-annealed atomic-layer-deposited silicon nitride as a high-k gate dielectric with high reliability
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