Roughness of the silicon (001)/SiO2interface
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.109109
Reference11 articles.
1. The Si–SiO2 interface: Correlation of atomic structure and electrical properties
2. Ordering atSi(111)a−Siand Si(111)/SiO2Interfaces
3. X-ray scattering studies of thin films and surfaces: thermal oxides on silicon
4. X-ray scattering studies of the Si-SiO2interface
5. A structural study of the thermally oxidized Si(001) wafer by X-ray CTR scattering
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