Measurement of Roughness of Two Interfaces of a Dielectric Film by Scattering Ellipsometry
Author:
Publisher
American Physical Society (APS)
Subject
General Physics and Astronomy
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevLett.85.349/fulltext
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1. Dependence of thin-oxide films quality on surface microroughness
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