Compact microwave ion source for extremely low energy ion irradiation system
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1150415
Reference6 articles.
1. Stress-related effects in thin films
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3. Transparent carbon film prepared by mass‐separated negative‐carbon‐ion‐beam deposition
4. Development of ion irradiation system for in situ observation of ion irradiated semiconductor surfaces by ultra high vacuum scanning tunneling microscope
5. Development of compact microwave ion source for low-energy application
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1. Development and test of 2.45 GHz microwave ion source based intense ion beam experimental facility;Vacuum;2016-02
2. Emittance of compact microwave ion source for low energy application;Review of Scientific Instruments;2014-02
3. Studies on the effect of the axial magnetic field on the x-ray bremsstrahlung in a 2.45 GHz permanent magnet microwave ion source;Review of Scientific Instruments;2014-02
4. Metal-free and gasless space charge compensation of low energy ion beam by using surface-carbonized silicon field emitter array;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2010-03
5. Review on high current 2.45 GHz electron cyclotron resonance sources (invited);Review of Scientific Instruments;2010-02
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