Prolongation of a filament lifetime using SF6 plasma method-Reference-Cited by-同舟云学术

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Prolongation of a filament lifetime using SF6 plasma method

Published:2000-02 Issue:2 Volume:71 Page:1174-1176
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Ohkoshi Kiyonori,Saitoh Yuichi,Kamiya Tomihiro,Sakai Takuro,Tajima Satoshi

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1150419

Reference4 articles.

1. The technology and chemistry of heavy ion sources

2. TIARA electrostatic accelerators for multiple ion beam application

3. Production of multiply charged metallic ions by compact electron cyclotron resonance ion source with SF6 plasma

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High‐accuracy measurement of ³⁶SF₅⁺ signal using an ultrahigh‐resolution isotope ratio mass spectrometer;Rapid Communications in Mass Spectrometry;2024-06-24

2. Generation of plasma from multiple targets by laser ion source for TIARA ion implanter;Journal of Physics: Conference Series;2024-05-01

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