Incorporation of dopant impurities into a silicon oxynitride matrix containing silicon nanocrystals
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4948579
Reference28 articles.
1. Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers
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4. Diffusivity measurements of silicon in silicon dioxide layers using isotopically pure material
5. Nitrogen Diffusion in Amorphous Silicon Nitride Isotope Multilayers Probed by Neutron Reflectometry
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1. Formation of SiP2 Nanocrystals Embedded in SiO2 from Phosphorus-Rich SiO1.5 Thin Films;The Journal of Physical Chemistry C;2020-03-16
2. Doped and codoped silicon nanocrystals: The role of surfaces and interfaces;Progress in Surface Science;2017-12
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