Machining of optical micro-mold by laser-induced chemical etching-Reference-Cited by-同舟云学术

Machining of optical micro-mold by laser-induced chemical etching

Published:2019-05 Issue:5 Volume:9 Page:055106
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:AIP Advances

Author:

Gan Zihao¹²³^ORCID,Peng Xiaoqiang¹²³,Guan Chaoliang¹²³

Affiliation:

1. College of Intelligent Science, National University of Defense Technology, Changsha 410073, China

2. Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology, De Ya Road, Changsha 410073, China

3. Hunan Key Laboratory of Ultra-Precision Machining Technology, Changsha 410073, China

Funder

National Key Research and Development Program

Science Challenge Project

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5095590

Reference22 articles.

1. Wet etching of silicon gratings with triangular profiles

2. Fabrication of Solid State Nanopore in Thin Silicon Membrane Using Low Cost Multistep Chemical Etching

3. Ultrashort pulse laser ablation of dielectrics: Thresholds, mechanisms, role of breakdown

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