Fabrication of fused silica microstructure based on the femtosecond laser-Reference-Cited by-同舟云学术

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Fabrication of fused silica microstructure based on the femtosecond laser

Published:2021-09-01 Issue:9 Volume:11 Page:095218
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:AIP Advances

Author:

Jian Dunxiang¹^ORCID,Hou Zhanqiang¹²,Wang Chengxiang¹,Zhuo Ming¹²,Xiao Dingbang¹²³,Wu Xuezhong¹²³

Affiliation:

1. College of Intelligence Science, National University of Defense Technology, Changsha 410073, China

2. Hu’nan MEMS Research Center, Changsha 410073, China

3. Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology, Changsha 410073, China

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0059443

Reference24 articles.

1. 1.5-Million Q-Factor Vacuum-Packaged Birdbath Resonator Gyroscope (BRG)

2. Subsurface mechanical damage during bound abrasive grinding of fused silica glass

3. Hybrid process of fabricating high-quality micro wine-glass fused silica resonators

4. Plasma Etching of Deep High-Aspect Ratio Features Into Fused Silica

5. Laser Beam MicroMachining (LBMM) – A review

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Review of an Investigation of the Ultrafast Laser Processing of Brittle and Hard Materials;Materials;2024-07-24

2. High-Precision Processing Technology of Quartz Glass with Ultraviolet Femtosecond Laser Filaments;CHIN J LASERS;2024

3. Equivalence ionisation effect of 1 MeV electron and proton space particles and γ-rays on optical silica;Applied Physics A;2024-02-10

4. The influence of photothermal effect on the resonance frequency of fused silica micro hemispherical resonator;Measurement Science and Technology;2023-10-05

5. Femtosecond laser modification combined with chemical etching to achieve high-quality cutting of millimeter-thick fused silica;Optik;2022-11

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