Author:
Xing Yaliang,Zhang Weiping,Tang Jian,Sun Dianjun,Liu Zhaoyang,Ou Bin
Publisher
Springer Science and Business Media LLC
Reference14 articles.
1. EKLUND E J, SHKEL A M. Glass blowing on a wafer level [J]. Journal of Microelectromechanical Systems, 2007, 16(2): 232–239.
2. SHAO P, TAVASSOLI V, MAYBERRY C L, et al. A 3D-HARPSS polysilicon micro-hemispherical shell resonating gyroscope: Design, fabrication, and characterization [J]. IEEE Sensors Journal, 2015, 15(9): 4974–4985.
3. KANIK M, BORDEENITHIKASEM P, SCHROERS J, et al. Microscale three-dimensional hemispherical shell resonators fabricated from metallic glass [C]//International Symposium on Inertial Sensors and Systems (ISISS). [s.l.]: IEEE, 2014: 1–4.
4. PAI P, CHOWDHURY F K, MASTRANGELO C H, et al. MEMS-based hemispherical resonator gyroscopes [J]. IEEE Sensors, 2012. Doi: 10.1109/ICSENS.2012.6411346 (published online).
5. HEIDARI A, CHAN M L, YANG H A, et al. Micromachined polycrystalline diamond hemispherical shell resonators [C]//The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers & Eurosensors XXVII). Barcelona: IEEE, 2013: 2415–2418.
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献