Characterization of surface structure in sputtered Al films: Correlation to microstructure evolution
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.369206
Reference15 articles.
1. Effect of texture and grain structure on electromigration in Al-0.5%Cu thin films
2. Analytical and numerical modeling of columnar evolution in thin films
3. Macroscopic model for columnar growth of amorphous films by sputter deposition
4. The growth dynamics of thick sputtered copper coatings under the influence of surface diffusion: A quantitative atomic force microscopy study
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