New inorganic electron resist system for high resolution lithography
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.93687
Reference12 articles.
1. A new inorganic electron resist of high contrast
2. Silver Halide‐Chalcogenide Glass Inorganic Resists for X‐Ray Lithography
3. Inorganic resist for dry processing and dopant applications
4. Germanium selenide: A resist for low‐energy ion beam lithography
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