Preparation of electrically conductive diamond-like carbon films using i-C4H10/N2 supermagnetron plasma
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1344586
Reference14 articles.
1. Pulsed laser deposition of amorphous diamond-like carbon films with ArF (193 nm) excimer laser
2. Evaluation of the ion bombardment energy for growing diamondlike carbon films in an electron cyclotron resonance plasma enhanced chemical vapor deposition
3. High-resolution resist etching for quartermicron lithography using O[sub 2]/N[sub 2] supermagnetron plasma
4. Thickness distribution of large-area diamondlike carbon films formed by CH4/H2 supermagnetron plasma chemical vapor deposition with application of a stationary magnetic field
5. Probe diagnostics of supermagnetron plasma with applications of continuous and pulse-modulated rf electric fields
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