Interface properties of Si-SiO2-Ta2O5 structure by cathodoluminescence spectroscopy
Author:
Affiliation:
1. St. Petersburg State University, St. Petersburg 198504, Russia
2. School of Physics, The University of Western Australia, Perth, Western Australia 6009, Australia
Funder
Research Grant of St. Petersburg State University
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4941270
Reference22 articles.
1. Wear-out of Al–Ta2O5/SiO2–Si structures under dynamic stress
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