Growth and characterization of ultrathin zirconia dielectrics grown by ultraviolet ozone oxidation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1410871
Reference12 articles.
1. Thermodynamic stability of binary oxides in contact with silicon
2. Structural properties and quasiparticle band structure of zirconia
3. The Photochemical Generation of Ozone : Present State–of–the–Art
4. Low Temperature Silicon Surface Cleaning by HF Etching/Ultraviolet Ozone Cleaning (HF/UVOC) Method (II)–in situUVOC
5. Low temperature photo-assisted oxidation of silicon
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