Microtomography and improved resolution in cathodoluminescence microscopy using confocal mirror optics-Reference-Cited by-同舟云学术

Microtomography and improved resolution in cathodoluminescence microscopy using confocal mirror optics

Published:2004-09-20 Issue:10 Volume:75 Page:3191-3199
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:

Author:

Chan D. S. H.¹,Liu Y. Y.¹,Phang J. C. H.¹,Rau E.²,Sennov R.²,Gostev A. V.²

Affiliation:

1. Centre for Integrated Circuit Failure Analysis and Reliability, Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117576, Singapore

2. Moscow State University and Institute of Microelectronics Technology, Russian Academy of Science, 142432 Chernogolovka, Moscow 119899, Russia

Publisher

AIP Publishing

Subject

Instrumentation

Reference15 articles.

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3. J. C. H. Phang, K. L. Pey, and D. S. H. Chan, IEEE Trans. Electron Devices 39, 782 (1992).IETDAI0018-9383

4. V. I. Pefrov and R. S. Gvozdover, Scanning 13, 410 (1991).SCNNDF0161-0457

5. J. Christen and D. Bimberg, Rev. Phys. Appl. 24, 85 (1989).RPHAAN0035-1687

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