Deposition of polycrystalline β-SiC films on Si substrates at room temperature
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.118372
Reference9 articles.
1. A novel /spl beta/-SiC/Si heterojunction backward diode
2. a-SiC:H thin film visible light-emitting diodes with highly conductive wide band gap a-SiC:H as the carrier injection layers
3. The role of an amorphous SiC:H 'buffer' in the high-performance mu c-SiC:H/a-SiC:H/poly-Si heterojunction solar cells
4. Radiation Damage in SiC
5. Growth of SiC Films on Si(100) by Electron Cyclotron Resonance Chemical Vapor Deposition Using SiH4 / CH 4 / H 2
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1. High rate fabrication of room temperature red photoluminescent SiC nanocrystals;Journal of Materials Chemistry C;2015
2. SiC nanocrystals: high-rate deposition and nano-scale control by thermal plasma;RSC Adv.;2014
3. Influence of hydrogen partial pressure on growth and properties of nanocrystalline SiC by magnetron sputtering;The European Physical Journal Applied Physics;2006-10
4. Influence of hydrogen dilution and substrate temperature on growth of nanocrystalline hydrogenated silicon carbide films deposited by RF sputtering;Microelectronics Journal;2006-10
5. Influence of substrate temperature on growth of nanocrystalline silicon carbide by reactive magnetron sputtering;Journal of Applied Physics;2005-07-15
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