Hydrogen and ammonia response of metal‐silicon dioxide‐silicon structures with thin platinum gates
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.341846
Reference31 articles.
1. Hydrogen sensitive mos-structures
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4. The fabrication of amorphous SiO2 substrates suitable for transmission electron microscopy studies of ultrathin polycrystalline films
5. Determination of urea with an ammonia gas-sensitive semiconductor device in combination with urease
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