Gas source silicon molecular beam epitaxy using disilane
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.99106
Reference7 articles.
1. Silicon molecular beam epitaxy: 1984–1986
2. Boron heavy doping for Si molecular beam epitaxy using a HBO2source
3. Gas source silicon molecular beam epitaxy using silane
4. A New Preferential Etch for Defects in Silicon Crystals
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