Production of uniform large‐diameter radio‐frequency discharge plasma
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.113062
Reference4 articles.
1. Langmuir probe measurements of a radio frequency induction plasma
2. RF Plasma Production at Ultralow Pressures with Surface Magnetic Confinement
3. Electron energy distribution function measurements in a planar inductive oxygen radio frequency glow discharge
4. Uniform plasma produced by a plane slotted antenna with magnets for electron cyclotron resonance
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