Uniform plasma produced by a plane slotted antenna with magnets for electron cyclotron resonance
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.108661
Reference9 articles.
1. Polymerization of Organosilicones in Microwave Discharges
2. Difluorocarbene Emission Spectra from Fluorocarbon Plasmas and Its Relationship to Fluorocarbon Polymer Formation
3. Reactive Ion Beam Etching Using a Broad Beam ECR Ion Source
4. Plasma structures in an electron cyclotron resonance plasma processing device
5. NONRESONANT ABSORPTION OF ELECTROMAGNETIC WAVES IN A HIGH‐DENSITY PLASMA
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