Study of the rapid thermal nitridation and silicidation of Ti using elastic recoil detection. II. Ti on SiO2
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.340411
Reference5 articles.
1. Study of the rapid thermal nitridation and silicidation of Ti using elastic recoil detection. I. Ti on Si
2. Interaction Between Ti and SiO2
3. Formation of Titanium Nitride/Silicide Bilayers by Rapid Thermal Anneal in Nitrogen
4. Thin‐film reaction between Ti and Si3N4
5. Rapid Thermal Annealing of Tisi2 for Interconnects
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