Neutral gas temperatures in a multipolar electron cyclotron resonance plasma
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.105232
Reference7 articles.
1. Laser‐induced fluorescence measurements of transverse ion temperature in an electron cyclotron resonance plasma
2. Plasma characterization of an electron cyclotron resonance–radio‐frequency hybrid plasma reactor
3. Spatially resolved ion velocity distributions in a diverging field electron cyclotron resonance plasma reactor
4. Charged particle densities and energy distributions in a multipolar electron cyclotron resonant plasma etching source
5. The experimental test of a microwave ion beam source in oxygen
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