Note: An absolute X-Y-Θ position sensor using a two-dimensional phase-encoded binary scale-Reference-Cited by-同舟云学术

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Note: An absolute X-Y-Θ position sensor using a two-dimensional phase-encoded binary scale

Published:2018-04 Issue:4 Volume:89 Page:046105
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Kim Jong-Ahn¹,Kim Jae Wan¹²,Kang Chu-Shik¹²,Jin Jonghan¹²

Affiliation:

1. Center for Optical Metrology, Korea Research Institute of Standards and Science, 267 Gajeong-ro, Yuseong-gu, Daejeon 305-340, South Korea

2. Department of Science of Measurement, Korea University of Science and Technology, 217 Gajeong-ro, Yuseong-gu 305-350, South Korea

Funder

Korea Research Institute of Standards and Science

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5022717

Reference6 articles.

1. Performance Characterization of an xy-Stage Applied to Micrometric Laser Direct Writing Lithography

2. Kinematics, pattern recognition, and motion control of mask–panel alignment system

3. High resolution planar encoder by retro-reflection

4. Note: Nonlinearity error compensated absolute planar position measurement using a two-dimensional phase-encoded binary grating

5. A vision-based method for planar position measurement

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1. Flat Magnetic X–Y Alignment Sensor;IEEE Sensors Letters;2024-07

2. Measurement of six-degree-of-freedom geometric errors of a translation stage using three absolute position encoders;Measurement Science and Technology;2024-02-08

3. Pose Measurement at Small Scale by Spectral Analysis of Periodic Patterns;International Journal of Computer Vision;2022-04-19

4. An efficient solution for correlative microscopy and co-localized observations based on multiscale multimodal machine-readable nanoGPS tags;Measurement Science and Technology;2021-02-15

5. Robust Phase-Based Decoding for Absolute (X, Y, Θ) Positioning by Vision;IEEE Transactions on Instrumentation and Measurement;2021

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