Control of in-plane texture of body centered cubic metal thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.366239
Reference15 articles.
1. Blanket and Local Crystallographic Texture Determination in Layered Al Metallization
2. Microstructural origin of in‐plane magnetic anisotropy in magnetron in‐line sputtered CoPtCr thin‐film disks
3. Texture development in polycrystalline thin films
4. Monte Carlo simulation of the thermalization of sputtered atoms and reflected atoms in the magnetron sputtering discharge
5. Origin of In-Plane Texturing in Sputtered Mo Films
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