Nitrogen effects on thermal donor and shallow thermal donor in silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.359024
Reference10 articles.
1. Interaction of dislocations with impurities in silicon crystals studied byin situX-ray topography
2. Thermal acceptor formation in nitrogen‐doped silicon
3. Diffusion coefficient of a pair of nitrogen atoms in float‐zone silicon
4. Oxygen‐nitrogen complexes in silicon formed by annealing in nitrogen
5. Nitrogen effect on oxygen precipitation in Czochralski silicon
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3. On the mechanism underlying the elimination of nitrogen-oxygen shallow thermal donors in nitrogen-doped Czochralski silicon at elevated temperatures;Journal of Applied Physics;2021-04-14
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