Oxygen‐nitrogen complexes in silicon formed by annealing in nitrogen
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.100899
Reference5 articles.
1. Deep-level nitrogen centers in laser-annealed ion-implanted silicon
2. Nitrogen-Oxygen Complexes as Shallow Donors in Silicon Crystals
3. The Nature of Nitrogen-Oxygen Complexes in Silicon
4. Shallow Impurity States in Silicon and Germanium
5. Diffusion coefficient of a pair of nitrogen atoms in float‐zone silicon
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