Monte Carlo calculation of the thermalization of atoms sputtered from the cathode of a sputtering discharge
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.342593
Reference19 articles.
1. Stress and microstructure of sputter‐deposited thin films: Molecular dynamics investigations
2. Ion-based methods for optical thin film deposition
3. On resolving the anomaly of indium-tin oxide silicon junctions
4. Selective thermalization in sputtering to produce high T<inf>c</inf>films
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