A magnification-continuous calibration method for SEM-based nanorobotic manipulation systems-Reference-Cited by-同舟云学术

A magnification-continuous calibration method for SEM-based nanorobotic manipulation systems

Published:2019-05 Issue:5 Volume:90 Page:053706
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Pang Shuiquan¹,Zhang Xianmin¹,Zhang Xiang¹,Lu Yihua¹

Affiliation:

1. Guangdong Key Laboratory of Precision Equipment and Manufacturing Technology, School of Mechanical and Automotive Engineering, South China University of Technology, Guangzhou 510640, People’s Republic of China

Funder

National Natural Science Foundation of China

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5086940

Reference30 articles.

1. L. Reimer, Scanning Electron Microscopy — Physics of Image Formation and Microanalysis (Springer Series in Optical Sciences, Volume 45. Editiorial Board: J. M. Enoch, D. L. Macadam, A. L. Schawlow, K. Shimoda and T. Tamir). XVIII + 457 S., 247 Abb., 5 Tab. Berlin-Heidelberg-New York-Tokyo 1985. Springer Verlag. DM 112,00. ISBN: 3-540-13530-8

2. Visual Servoing-Based Nanorobotic System for Automated Electrical Characterization of Nanotubes inside SEM

3. Automated Mechanical Characterization of 2-D Materials using SEM based Visual Servoing

4. Automated Robotic Manipulation of Individual Colloidal Particles Using Vision-Based Control

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