Fabrication of freely suspended nanostructures by nanoimprint lithography
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2180872
Reference13 articles.
1. Fabrication of 5nm linewidth and 14nm pitch features by nanoimprint lithography
2. Nanoimprint lithography
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4. Fabrication of molecular-electronic circuits by nanoimprint lithography at low temperatures and pressures
5. High-resolution organic polymer light-emitting pixels fabricated by imprinting technique
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2. Fabrication of nanoresonator biosensing arrays using nanoimprint lithography;Journal of Micro/Nanolithography, MEMS, and MOEMS;2012-06-20
3. Nanoimprint Lithography Simulation of the Polymer Chains (CH2)n with Anti-Adhesion Layer on Stamp by Molecular Dynamics Method;Journal of Computational and Theoretical Nanoscience;2012-05-01
4. Critical size, recovery, and mechanical property of nanoimprinted Ni–Al alloys investigation using molecular dynamics simulation;Computational Materials Science;2012-02
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