High-rate reactive ion etching of barium hexaferrite films using optimal CHF3/SF6 gas mixtures
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3099884
Reference12 articles.
1. Ba-hexaferrite films for next generation microwave devices (invited)
2. Growth of Ba-hexaferrite films on single crystal 6-H SiC
3. Structure and Magnetism of Ba-Hexaferrite Films Grown on Single Crystal 6-H SiC With Graduated Interfacial MgO Buffer Layers
4. Epitaxial growth of M-type Ba-hexaferrite films on MgO (111)‖SiC (0001) with low ferromagnetic resonance linewidths
5. Magnetic anisotropy and crystalline texture in BaO(Fe2O3)6 thin films deposited on GaN∕Al2O3
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