A high-precision silicon-on-insulator position sensor

Author:

Beck Paul12ORCID,Wynne Laura C.3,Iadanza Simone45ORCID,O’Faolain Liam45ORCID,Schulz Sebastian A.3ORCID,Banzer Peter126ORCID

Affiliation:

1. Max Planck Institute for the Science of Light 1 , Staudtstr. 2, D-91058 Erlangen, Germany

2. Department of Physics, Institute of Optics, Information and Photonics, Friedrich-Alexander-University Erlangen-Nuremberg 2 , Staudtstr. 7/B2, D-91058 Erlangen, Germany

3. School of Physics and Astronomy, SUPA, University of St Andrews 3 , North Haugh, St Andrews KY16 9SS, United Kingdom

4. Centre for Advanced Photonics and Process Analysis, Munster Technological University 4 , Bishopstown, T12 P928 Cork, Ireland

5. Tyndall National Institute, Lee Maltings 5 , Dyke Parade, T12 R5CP Cork, Ireland

6. Institute of Physics, NAWI Graz, University of Graz 6 , Universitätsplatz 5, Graz 8010, Austria

Abstract

Integrated photonic devices provide significant advantages over their conventional counterparts, such as a drastically reduced footprint as well as compatibility with other photonic or electronic circuitry. In this work, we present a high-precision optical position sensor fabricated on a silicon-on-insulator platform. The sensor relies on the principle of position-dependent directional waveguide coupling upon excitation of a monolithically integrated scatterer with a tightly focused polarization-tailored beam. We demonstrate a spatial resolution of 7.2 nm, corresponding to approximately λ/200.

Publisher

AIP Publishing

Subject

Computer Networks and Communications,Atomic and Molecular Physics, and Optics

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