Thickness dependence of nanofilm elastic modulus
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3120763
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1. A 90-nm Logic Technology Featuring Strained-Silicon
2. Strained Si, SiGe, and Ge channels for high-mobility metal-oxide-semiconductor field-effect transistors
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