Power dissipation measurements in a low‐pressure N2radio‐frequency discharge
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.357819
Reference33 articles.
1. Radio frequency sputtering—the significance of power input
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4. Measurement and analysis of radio frequency glow discharge electrical impedance and network power loss
5. Power loss mechanisms in radio frequency dry etching systems
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Illustration of the interface between N2/CO2 plasmas and polystyrene surface;Surface and Interface Analysis;2005
2. A novel Y-type reactor for selective excitation of atmospheric pressure glow discharge plasma;Review of Scientific Instruments;2001
3. Factors Influencing the Decomposition of CO2in AC Fan-Type Plasma Reactors: Frequency, Waveform, and Concentration Effects;Journal of Catalysis;1999-05
4. Power dissipation and impedance measurements in radio‐frequency discharges;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1996-09
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