Low‐temperature diffusion of Al into polycrystalline Si
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.323572
Reference7 articles.
1. Interaction of Al layers with polycrystalline Si
2. Interaction of metal layers with polycrystalline Si
3. Ti and V layers retard interaction between Al films and polycrystalline Si
4. Diffusivity and Solubility of Si in the Al Metallization of Integrated Circuits
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