Epitaxial growth of aluminum nitride on AlGaN by reactive sputtering at low temperature
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2967816
Reference15 articles.
1. Chemical vapour deposition of polycrystalline AlN films from AlCl3–NH3 mixtures: II — surface morphology and mechanisms of preferential orientation at low-pressure
2. Strain-relaxation in NH3-source molecular beam epitaxy of AlN epilayers on GaN epitaxial templates
3. Measurement of intrinsic stresses during growth of aluminum nitride thin films by reactive sputter deposition
4. rf‐sputtered aluminum nitride films on sapphire
5. Structural and electroacoustic studies of AlN thin films during low temperature radio frequency sputter deposition
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