Area-selective deposition of self-assembled monolayers on SiO2∕Si(100) patterns
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2400114
Reference17 articles.
1. Highly Stable Si−C Linked Functionalized Monolayers on the Silicon (100) Surface
2. Structure and reactivity of alkylsiloxane monolayers formed by reaction of alkyltrichlorosilanes on silicon substrates
3. Evidence of a transition temperature for the optimum deposition of grafted monolayer coatings
4. Electronic structure of a heterostructure of an alkylsiloxane self-assembled monolayer on silicon
5. Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments
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1. Self-assembled monolayers as inhibitors for area-selective deposition: A novel approach towards resist-less EUV lithography;Applied Surface Science;2022-12
2. Adsorption and thermal treatments of 1-dodecene on Si(100) investigated by STM;Surface Science;2015-03
3. Area Selective Molecular Layer Deposition of Polyurea Films;ACS Applied Materials & Interfaces;2013-11-27
4. Selective self-assembled monolayer coating to enable Cu-to-Cu connection in dual damascene vias;Microelectronic Engineering;2013-06
5. The PDMS-based microfluidic channel fabricated by synchrotron radiation stimulated etching;Optics Express;2010-04-23
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