Phase formation and stability of N+implanted SiC thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.364001
Reference9 articles.
1. Effect of ion and neutral sputtering on single crystal TiO2
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3. A Rutherford backscattering study of Ar- and Xe-implanted silicon carbide
4. ELECTRON LOCAL‐MODE PHONON INTERACTION IN METAL‐INSULATOR‐SEMICONDUCTOR TUNNEL JUNCTIONS
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