A modified molecular beam instrument for the imaging of radicals interacting with surfaces during plasma processing
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1147976
Reference30 articles.
1. Plasma modification of polymer surfaces for adhesion improvement
2. Silicon chemical vapor deposition one step at a time: fundamental studies of silicon hydride chemistry
3. Laser studies of the reactivity of SiH with the surface of a depositing film
4. Laser studies of the reactivity of imidogen (X3.SIGMA.-) with the surface of silicon nitride
5. Laser studies of the reactivity of SiO with the surface of a depositing film
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