A compact and low-weight sputtering unit for in situ investigations of thin film growth at synchrotron radiation beamlines
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Published:2015-05
Issue:5
Volume:86
Page:053906
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ISSN:0034-6748
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Container-title:Review of Scientific Instruments
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language:en
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Short-container-title:Review of Scientific Instruments
Author:
Walter P.,
Dippel A.-C.,
Pflaum K.,
Wernecke J.,
van den Hurk J.ORCID,
Blume J.,
Klemradt U.
Cited by
4 articles.
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