Size and location control of Si nanocrystals at ion beam synthesis in thin SiO2 films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1512952
Reference13 articles.
1. A silicon nanocrystals based memory
2. Control of Coulomb blockade oscillations in silicon single electron transistors using silicon nanocrystal floating gates
3. Formation of 2-D arrays of semiconductor nanocrystals or semiconductor-rich nanolayers by very low-energy Si or Ge ion implantation in silicon oxide films
4. The formation of narrow nanocluster bands in Ge-implanted SiO2-layers
5. Synthesis and characterization of aerosol silicon nanocrystal nonvolatile floating-gate memory devices
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