Recrystallization of Si on amorphous substrates by doughnut‐shaped cw Ar laser beam
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.93114
Reference3 articles.
1. Lateral Epitaxial Growth in Poly-Si Film over SiO2from Single-Si Seed by Scanning CW Ar Laser Annealing
2. Laser‐induced crystallization of silicon islands on amorphous substrates: Multilayer structures
3. The use of beam shaping to achieve large‐grain cw laser‐recrystallized polysilicon on amorphous substrates
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