The use of beam shaping to achieve large‐grain cw laser‐recrystallized polysilicon on amorphous substrates
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.92773
Reference6 articles.
1. V-1 laser fabrication of large-area arrays: Thin-film silicon isolated devices on fused Silica substrates
2. cw laser anneal of polycrystalline silicon: Crystalline structure, electrical properties
3. Resistivity changes in laser‐annealed polycrystalline silicon during thermal annealing
4. Dislocation Etch for (100) Planes in Silicon
5. Crystallographic orientation of silicon on an amorphous substrate using an artificial surface‐relief grating and laser crystallization
Cited by 83 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Laser-Induced Crystallization of Copper Oxide Thin Films: A Comparison between Gaussian and Chevron Beam Profiles;ACS Applied Materials & Interfaces;2022-10-27
2. Tendency of crystal orientation rotation toward stable {001} <100> during lateral crystal growth of Si thin film sandwiched by SiO2;Japanese Journal of Applied Physics;2021-04-26
3. Extension of the {100}-Oriented Grain-Boundary Free Si Thin Film Grown by a Continuous-Wave Laser Lateral Crystallization;Thin Solid Films;2020-08
4. High performance thin-film transistors fabricated on a single crystal Si strip by micro-chevron laser beam scanning method;Japanese Journal of Applied Physics;2020-07-01
5. Unseeded Crystal Growth of (100)-Oriented Grain-Boundary-Free Si Thin-Film by a Single Scan of the CW-Laser Lateral Crystallization of a-Si on Insulator;Crystals;2020-05-17
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3