1. The Institute of Microelectronics and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China
2. The Department of Microelectronics and Nanoelectronics, Tsinghua University, Beijing 100084, China
3. The Key Laboratory of Beam Technology of the Ministry of Education, College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China
4. The Center for Flexible Electronics Technology, Tsinghua University, Beijing 100084, People's Republic of China