Role of extraordinary waves in uniform electron cyclotron resonance plasmas
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.120416
Reference11 articles.
1. Electron cyclotron resonance plasma reactor for cryogenic etching
2. Axial radio frequency electric field intensity and ion density during low to high mode transition in argon electron cyclotron resonance discharges
3. Wave Propagation and Plasma Uniformity in an Electron Cyclotron Resonance Plasma Etch Reactor
4. Behavior of Ar plasmas formed in a mirror field electron cyclotron resonance microwave ion source
5. Production of a large diameter electron cyclotron resonance plasma using a multislot antenna for plasma application
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